منابع مشابه
Transparent polycrystalline cubic silicon nitride
Glasses and single crystals have traditionally been used as optical windows. Recently, there has been a high demand for harder and tougher optical windows that are able to endure severe conditions. Transparent polycrystalline ceramics can fulfill this demand because of their superior mechanical properties. It is known that polycrystalline ceramics with a spinel structure in compositions of MgAl...
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Accurate characterization of polycrystalline silicon (polysilicon) is not only a critical monitoring technique for chemical vapor deposition (CVD) process control, but also a necessity for gate line-width control in i-line/DUV lithography and dry etching. It requires that the thickness, refractive index and extinction coefficients (from DUV to near red) in polysilicon films be precisely and rap...
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Semi-Insulating Polycrystalline Silicon (SIPOS) films were deposited on Si02/Si, Si, and sapphire substrates by the chemical vapor deposition of silane and nitroiJs oxide at atmospheric and low pressures. X-ray diffraction was used to identify the phases present, and to study structural properties like grain size and strain as a function of the flow rate ratio, ~, = [N20]/[SiH4].oBoth APCVD and...
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The nonlinear behavior of the transfer characteristics of polycrystalline silicon thin-film transistors (poly-Si TFTs) at the threshold voltage was analyzed. The threshold voltage VT was defined as the gate voltage giving half of the maximum transconductance (GmMAX=2). The nonlinear parameter V was also introduced as the maximum transconductance divided by the differential of Gm at VT. VT and V...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2010
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.3457469